Kashiyama

Kashiyama began as Kashiyama Shoten in May 1946, shortly after World War II in Japan. The business was incorporated in January 1951 as Kashiyama Industries, Ltd., initially producing components for the automotive and construction markets before diversifying into industrial products.

Entry into Vacuum Technology:

• December 1971: Began producing water‑sealed rotary liquid ring vacuum pumps.

• 1982: Expanded with direct‑coupled oil rotary pumps.

• 1986: Developed Japan’s first dry vacuum pump, marking a major milestone for clean, oil‑free vacuum technology used in semiconductor and advanced manufacturing.

Global Expansion:

• 1987: Main Shinshu factory completed in Nagano Prefecture.

• 1995: Kashiyama USA Inc. established.

• 2003–2007: New subsidiaries launched in China, Korea, Taiwan, and other regions.

• 2018: Kashiyama Europe GmbH opened in Germany, bringing vacuum technology closer to European customers.

Kashiyama has received multiple awards for manufacturing excellence and delivered hundreds of thousands of dry pumps globally, solidifying its reputation in the vacuum technology market.

Current Focus:
Kashiyama specializes in engineered vacuum solutions, particularly dry and multi‑stage vacuum pumps for semiconductor, display, research, and industrial applications. Their products meet strict requirements for clean, oil-free environments in advanced manufacturing processes.

Kashiyama Product Line

Kashiyama offers a broad range of vacuum pumps, hardware, and software. Best renowned for its vertical screw pumping technology, with improved energy-saving structure, SDE series offers unrivaled reliability and productivity in harsh applications. Designed for on board installation, MU series offers powerful pumping performance from small footprint requiring only 400 watts (MU100X) at vacuum. SDL series offers high pumping speed from atmosphere, achieving high throughput for large load lock and FPD applications.

Applications:
Kashiyama pumps are used in:

• Semiconductor manufacturing

• Mass spectrometry

• Chromatography

• Surface analysis (XPS, SIMS)

• Electron microscopy

• Vacuum deposition (PVD, CVD)

They provide precise vacuum conditions for analytical accuracy, nanoscale imaging, and thin-film deposition.

Technology and Innovation:

• R&D Focus: Developing reliable, efficient, and environmentally friendly vacuum pump technologies in collaboration with customers.

• Recent Innovations: Dry pumps, multi-stage vacuum systems, integrated pumping stations, and advanced control software for real-time monitoring.

• Future Direction: New materials and manufacturing processes for higher efficiency, compact intelligent systems, and reduced environmental impact.

Kashiyama’s commitment to high quality vacuum pumps ensures a wide range of reliable, efficient, and environmentally friendly vacuum pumps and systems, maintaining its leadership in the vacuum technology industry.