Seiko Seiki
Seiko Seiki STP-H600C Turbo Pump, Rebuilt
$ 26,713.00
- Type of product: turbo pump
- Manufacturer: Seiko Seiki
- Condition: rebuilt
- Price: $26,713.00
- Part number: B74950000R
- Inlet: ISO200
- Exhaust: KF40
- Pumping speed: 600 l/s (N2)
- Compression ratio: > 10^8 (N2)
- Ultimate pressure: 1 x 10-9 Torr
- Weight: 69 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Recommended backing pump | QDP-40 |
| Applications | plasma & ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers |
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