Seiko Seiki STP-H200C Turbo Pump, Factory Rebuilt Small Image 1
Seiko Seiki STP-H200C Turbo Pump, Factory Rebuilt Small Image 2
Seiko Seiki STP-H200C Turbo Pump, Factory Rebuilt Small Image 3

Seiko Seiki

Seiko Seiki STP-H200C Turbo Pump, Factory Rebuilt

$ 13,194.00

  • Type of product: turbo pump
  • Manufacturer: Seiko Seiki
  • Condition: factory rebuilt
  • Price: $13,194.00
  • Inlet: ISO100
  • Exhaust: KF25
  • Pumping speed: 220 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Ultimate pressure: 1 x 10-9 Torr
  • Weight: 44 lbs
  • *Other Configurations Available Upon Request
  • OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
MANUAL
TECHNICAL SHEET

Technical Specs

Recommended controller SCU-H200C
Recommended backing pumps E2M18 • QDP-40
Applications plasma & ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers
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