Seiko Seiki
Seiko Seiki STP-600 Turbo Pump, Rebuilt
$ 19,143.00
- Type of product: turbo pump
- Manufacturer: Seiko Seiki
- Condition: rebuilt
- Price: $19,143.00
- Inlet: ISO200K
- Exhaust: KF40
- Pumping speed: 650 l/s (N2)
- Compression ratio: > 10^8 (N2)
- Ultimate pressure: 7.5 x 10-10 Torr
- Weight: 66 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Recommended controller | SCU-600 |
| Recommended backing pump | E2M18 |
| Applications | plasma etch • electron cyclotron resonance • film deposition • ion implantation • sputtering • MBE • diffusion • photo resist stripping • crystal growth • water inspection • load-lock chambers |
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