Seiko Seiki
Seiko Seiki STP-400 Turbo Pump, Rebuilt
$ 6,705.00
- Type of product: turbo pump
- Manufacturer: Seiko Seiki
- Condition: rebuilt
- Price: $6,705.00
- Inlet: ISO160
- Exhaust: KF25
- Pumping speed: 420 l/s (N2)
- Compression ratio: > 10^8 (N2)
- Weight: 27 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Recommended controller | SCU-300 |
| Recommended backing pump | E2M12 |
| Applications | plasma etch • ECR etch • film deposition • sputtering • ion implantation source • beam line pumping • MBE • diffusion • photo resist stripping • crystal / expitaxial growth • wafer inspection • load lock chambers |
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