Edwards STP-451CB1 Turbo Pump, Rebuilt

$ 13,194.00

  • Type of product: turbo pump
  • Manufacturer: Edwards
  • Condition: rebuilt
  • Price: $13,194.00
  • Inlet: ISO160K
  • Exhaust: KF40
  • Purge: KF10
  • Pumping speed: 480 l/s (N2)
  • Compression ratio: > 10^8 (N2)
  • Weight: 27 lbs
  • *Other Configurations Available Upon Request
  • OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
MANUAL
TECHNICAL SHEET

Technical Specs

Applications plasma etch • electron cyclotron resonance • film deposition • ion implantation • sputtering • MBE • diffusion • photo resist stripping • crystal growth • water inspection • load-lock chambers
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