Edwards
Edwards iL-70 Dry Pump, Rebuilt
$ 8,868.00
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: rebuilt
- Price: $8,868.00
- Inlet: ISO63 bolted
- Exhaust: KF40
- Pumping speed: 49.4 CFM (60Hz)
- Ultimate pressure: 2.25 x 10-2 Torr (60Hz)
- Weight: 507 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Applications | semiconductor fabrication processes • load lock • transfer chamber • PVD • SEM |
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