Edwards
Edwards iH-80 Dry Pump
Pricing and lead time confirmed with inquiry
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: new
- Price: ASK
- Inlet: ISO63 bolted
- Exhaust: KF40
- Motor: 3 Phase, 460V, 50/60Hz
- Pumping speed: 61 CFM (60Hz)
- Ultimate pressure: 7.5 x 10-3 Torr (60Hz)
- Weight: 530 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Applications | load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source • HPD CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD |
HAVE QUESTIONS?
GET IN TOUCH
We can answer them for you.
