Edwards iH-600 Dry Pump, Rebuilt Small Image 1
Edwards iH-600 Dry Pump, Rebuilt Small Image 2
Edwards iH-600 Dry Pump, Rebuilt Small Image 3
Edwards iH-600 Dry Pump, Rebuilt Small Image 4
Edwards iH-600 Dry Pump, Rebuilt Small Image 5

Edwards

Edwards iH-600 Dry Pump, Rebuilt

$ 17,520.00

  • Type of product: dry pump
  • Manufacturer: Edwards
  • Condition: rebuilt
  • Price: $17,520.00
  • Inlet: ISO100
  • Exhaust: KF40
  • Motor: 3 Phase, 460V, 50/60Hz
  • Pumping speed: 353 CFM (60Hz)
  • Ultimate pressure: 5.3 x 10-4 Torr (60Hz)
  • Weight: 915 lbs
  • *Other Configurations Available Upon Request
  • OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
MANUAL
TECHNICAL SHEET

Technical Specs

Applications load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source • HPD CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD
HAVE QUESTIONS?

We can answer them for you.

GET IN TOUCH
Vacuum Pump Repair Questions