Edwards
Edwards iH-600 Dry Pump
Pricing and lead time confirmed with inquiry
- Type of product: dry pump
- Manufacturer: Edwards
- Condition: new
- Price: ASK
- Inlet: ISO100
- Exhaust: KF40
- Motor: 3 Phase, 460V, 50/60Hz
- Pumping speed: 353 CFM (60Hz)
- Ultimate pressure: 5.3 x 10-4 Torr (60Hz)
- Weight: 915 lbs
- *Other Configurations Available Upon Request
- OUT OF STOCK ITEMS STILL AVAILABLE FOR PURCHASE, please contact
Technical Specs
| Applications | load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source • HPD CVD • RTP • SACVD • MOCVD • PECVD • LPCVD • ALD |
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